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2019-02-16 点击量：
| 产品特点 Product features: | |||
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1.使用与美国西南研究院(SwRI)合作开发研制的新型镀膜技术－等离子体增强磁控溅射技术； Utilize a novel coating technology in cooperation with the Southwest Research Institute (SwRI)— Plasma Enhanced Magnetron Sputtering (PEMS); |
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2.更高的沉积效率，更致密的涂层，更小的表面粗糙度，涂层厚度最高可达560um； Higher deposition rate, denser structure, smoother morphology, up to 560um coating thickness; |
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3.刀具，微型刀具，模具，汽车，飞机发动机零部件涂层的理想选择； Ideal for large quantities of cutting tools, microtools, stamping, die-casting, plastic moulding, aircraft and automobile engine parts; |
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4.可对产品进行涂前氮化处理； Provide ion nitriding case hardening process before PVD coating; |
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5.可同炉沉积最多4种不同成分靶材材料； Evaporation up to 4 target materials per batch. |
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| SKYVAC VacSputterTM 65 | |||
| 转盘直径 Swing diameter | 380mm | ||
| 涂层有效高度 Coatable height | 380mm | ||
| 最大装载量 Max. loading capacity | 100kg | ||
| 技术 Technology | 磁控溅射 Sputtering | ||
| 磁控溅射源 Sputtering sources | 4组磁控溅射源 4 sets | ||
| 可选技术 Technology options |
等离子体增强磁控溅射及涂前氮化处理 PEMS and nitrogen treatment |
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| 气体 Gas modules | Ar, N2, H2, C2H2, O2, He | ||
| 最大加热温度 Max. heating temperature | 500℃ | ||
| 设备尺寸 Dimensions | |
| 长 Length | 2820mm |
| 宽 Width | 1410mm |
| 高 Height | 2356mm |
| 占地面积 Footprint | 4m2 |
| 重量 Weight | 3360kg |