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2019-02-16 点击量:
产品特点 Product features | |||
1.新一代弧源设计,具有更高的靶材利用率及更好的液滴控制; Utilize new generation cathode to achieve better target utilization and reduced large particles; |
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2.刀具,微型刀具,刀粒,模具及零件涂层生产的理想选择; Ideal for large quantities of cutting tools, microtools, inserts, stamping, die-casting, plastic moulding and components; |
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3.可对产品进行涂前氮化处理; Provide ion nitriding case hardening process before PVD coating; |
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4.可同炉沉积最多4种不同成分靶材材料; Evaporation up to 4 target materials per batch; |
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5.更高的产能(每天4炉)。 Higher productivity (4 batches per day). |
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SKYVAC PlasArcTM 950 | |||
转盘直径 Swing diameter | 750mm | ||
涂层有效高度 Coatable height | 700mm | ||
最大装载量 Max. loading capacity | 400kg | ||
技术 Technology | 多弧 Arc | ||
弧源 Arc sources | 12个弧源 (100mm) 12 cathode positions (100mm) | ||
可选技术 Technology options | 磁控靶,离子源及涂前氮化处理 Sputtering, Ion source and nitrogen treatment | ||
气体 Gas modules | Ar, N2, H2, C2H2, O2, He | ||
最大加热温度 Max. heating temperature | 500℃ |
设备尺寸 Dimensions: | |
长 Length | 3640mm |
宽 Width | 2250mm |
高 Height | 2280mm |
占地面积 Footprint | 8.2m2 |
重量 Weight | 7000kg |